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Catalyst Synthesis Technology Appliedto Semiconductor Materials
Semiconductor Materials
TDMAT
| CODE | TDMAT |
|---|---|
| Material Name | Tetrakis(dimethylamido)titanium(IV) |
| CAS No. | 3275-24-9 |
| Specification | > 99.5%, < 150ppb by NMR, ICP-MS (>99%, <500ppb) |
| Commercial available |
Pilot scale |