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Catalyst Synthesis Technology Appliedto Semiconductor Materials

TDMAT structural formula

Semiconductor Materials

TDMAT

TDMAT specifications — code, material name, CAS number, purity specification, commercial availability
CODE TDMAT
Material Name Tetrakis(dimethylamido)titanium(IV)
CAS No. 3275-24-9
Specification > 99.5%, < 150ppb by NMR, ICP-MS (>99%, <500ppb)
Commercial
available
Pilot scale